Plasma processing and chemistry
نویسندگان
چکیده
منابع مشابه
Plasma processing and chemistry*
Plasma deposition and plasma conversion can be characterized by five steps: production by ionization, transfer of chemistry to precursors, transport of radicals to the surface, surface interactions with deposition, recirculation and generation of new monomers. For very fast deposition, large flows of radicals are needed and a regime is reached, in which monolayer coverage is reached in a very s...
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ژورنال
عنوان ژورنال: Pure and Applied Chemistry
سال: 2002
ISSN: 1365-3075,0033-4545
DOI: 10.1351/pac200274030369